|INTEGRAL TYPE MASS FLOW
MFC TYPE (Mass Flow Meter)
| The NTK mass flow
controller was the integral structure product where two kinds of MFC from
the conventional flow caliber from 3A through 10A and from 15A through 25A
have been assembled with the mass flow transmitter and the flow control
valve. In the mass flow range from 32A through 65A, this controller was
used in the separate combination with the mass flow transmitter + flow
control valve, but this controller has adopted a new mechanism of flow
control valve portion that has this time been developed, and thus
completed the mass flow controller of mono-block structure and thus has
been newly sold out.
- This controller is compact type where the mass flow meter has been
integrated with the control valve.
- The maximum air is 2NM3/M where the mass flow can be
- The pressure of gas itself is utilized to the control of value for
driving the controller.
- The primary side pressure needs the level higher than
- The consumed electric power is less because the drive motor is a
pulse motor of super compact size.
- Because two metallic bellows are used to the valve drive portion,
this controller has excellent responsibility and stability.
- Accuracy: Full scale +-1%
- Linearity: Full scale +-0.5%
- Reproducibility: Full scale +-0.2%
- Response: 0 through 93% Less than 2sec.
- Activating pressure difference: 0.7kg f/cm2G
- Max.pressure: 5kg f/cm2G
- Service temperature range: 0 through +45degrees centigrade
- Permissibble ambient temperature: 0 through +45degrees centigrade
- Working environmental: Limited to the indoor use
- Pressure affect: 0.2%/1kg f/cm2
- Temperature affect: 0.05%/1degree centigrade
- Temperature drift: 0.05%/1degree centigrade
- Flow caliber: 32A through 65A
- Measurement range: 1:50
- Control range: 1:20
- Power source: DC +-12V
- Output signal: DC0 through 5V
- Control: DC0 through 5V(outside settable)
- Valve drive system: Self-actuated constant differential pressure
meter, pulse motor drive.
- Valve shaft seal: Bellows seal structure(SUS316)
- Valve seal leakage: Lower than 2%FS
- Contact gas portion material: *SUS304, SUS316
- CV value: Constant value for every caliber
||Integral type Mass Flow Controller flow
||20 thorough 400Nl/min
||35 through 700
||2 through 40|
||60 through 1200
||3.5 through 70|
||100 through 2000